QuickPRO™ Metrology

Full-field interferometric 3D surface topography for form and finish.

Chromatic confocal + interferometric topography in a compact benchtop cube.

Optical-coherence tomography for volumetric, sub-surface measurement.

Calibration Kits

Vision System

Probes

Aspheric Surfaces

Measure lens tip/tilt, verify P-V and SAG, and identify deviation from the specified lens prescription.

Diffractive Aspheres

Measure surface deviations in zone diameter, depth, and transition gap, and identify localized slope errors.

LCD Color Filters

Measure photo-spacer location, dimensions, and integrity; gauge color-filter volume for LC one-drop fill; locate defects that cause Mura aberrations; and identify foreign-object contamination.

Micro-Lens Arrays

Inspect single-point diamond-turned (SPDT) mold geometry as pre-production QA, measure micro-lens height and profile, and identify local punctures or other structural aberrations from the forming process.

PCB Substrates

Inspect line width and feature spacing, scan for warpage, and measure via size, depth, and position.

Transparent Film

Measure the top and bottom surfaces of transparent films to identify critical deviations in thickness, then use the generated plots to pinpoint and implement process improvements that eliminate potential failure zones.

Patterned Photoresist

Use SD-OCT to simultaneously measure top-surface topography and film thickness at nanometer resolution — optimized for in-line process control post-exposure and pre-etch.

Off-Axis Aspheric Mirror

Simultaneous 3D measurement of surface form and alignment datums on non-axially-symmetric optical elements — ideal for qualification prior to aligning three-mirror anastigmatic imaging systems.

In-Tray Metrology of Micro-Lenses

4D (x, y, z, thickness) measurement of aspheric molded micro-lenses in-tray — top-surface-vertex to bottom-surface-vertex offset relative to a surface datum, at 0.1-micron precision and roughly 2 seconds per lens. Ideal for 100% inspection of lens-in-tray.