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Volumetric optical-coherence metrology
OCTIn Production
QuickPRO-OCT™
QuickPRO™ · Surface & Thickness Metrology
QuickPRO-OCT™ brings optical-coherence tomography to optical metrology — resolving multi-layer thickness and sub-surface structure volumetrically and non-destructively, for complex assemblies, bonded optics, and coating stacks.
Thickness res.0.1µm
Scan time< 2min
ModeOCT
Configuration highlights
Volumetric optical-coherence (OCT) measurement
Multi-layer thickness and sub-surface structure
Non-destructive, non-contact scanning
Built for complex assemblies and coating stacks
Specifications
Measurement
Surface accuracy< 1µm
Thickness resolution0.1µm
Lateral resolution2µm
SensingChromatic confocal + IFM
Throughput & capacity
Scan time< 2min
Sided scanningDualsides
TargetsOptics · PCB · Wafer
OriginUSA
QuickPRO-OCT™ specifications
Performance figures reflect the QuickPRO™ metrology platform. Contact our applications engineers for the exact configuration and options of the QuickPRO-OCT™ for your samples.
Best suited for
Multi-layer thicknessSub-surface defectsCoating stacksBonded opticsVolumetric scans
Configure the QuickPRO-OCT™ for your needs
Tell us about your samples and tolerances — we reply within one business day.