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Full-field 3D surface form
Surface formIn Production
QuickPRO-3D™
QuickPRO™ · Surface & Thickness Metrology
QuickPRO-3D™ delivers full-field interferometric measurement of surface form and finish — mapping high-resolution 3D topography across the whole aperture in seconds, for demanding polished and precision optical surfaces.
Accuracy< 1µm
Lateral res.2µm
Scan time< 2min
Configuration highlights
Full-field 3D surface topography across the whole aperture
High-resolution form and finish measurement
Non-contact interferometric sensing
Operator-guided workflow with digital records
Specifications
Measurement
Surface accuracy< 1µm
Thickness resolution0.1µm
Lateral resolution2µm
SensingChromatic confocal + IFM
Throughput & capacity
Scan time< 2min
Sided scanningDualsides
TargetsOptics · PCB · Wafer
OriginUSA
QuickPRO-3D™ specifications
Performance figures reflect the QuickPRO™ metrology platform. Contact our applications engineers for the exact configuration and options of the QuickPRO-3D™ for your samples.
Best suited for
Surface form (3D)FlatnessPolished opticsFinish & roughnessR&D metrology
Configure the QuickPRO-3D™ for your needs
Tell us about your samples and tolerances — we reply within one business day.