Thin film measurement captured by OATi's new QuickPRO-3D™ Profiler using chromatic confocal sensor technology. Figure shows a 3D image of a 4mm x 20mm scan, with 150nm accuracy and 20nm resolution (2D image, below). Thickness of the measured (SAN-17, PMMA) sample ranged from 40 microns to 56 microns. Display is MATLAB colorized point cloud.
QuickPRO-3D™ Profiler is designed for use on the production line, not stuck back in a metrology lab. Let us demonstrate its performance on your samples. Contact us today.
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